The influence of coating structure on micromachine stiction
نویسندگان
چکیده
J.G. Kushmerick a, M.G. Hankins b, M.P. de Boer c, P.J. Clews b, R.W. Carpick a,∗ and B.C. Bunker a a Biomolecular Materials and Interfaces 1140, MS 1413, Sandia National Laboratories, Albuquerque, NM 87185, USA b MDL Operations 1746, MS 1084, Sandia National Laboratories, Albuquerque, NM 87185, USA c Intelligent Micromachining 1749, MS 1080, Sandia National Laboratories, Albuquerque, NM 87185, USA
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